ECE 583
ECE 583 - Semiconductor Nanotech Lab
Fall 2008
| Title | Rubric | Section | CRN | Type | Hours | Times | Days | Location | Instructor |
|---|---|---|---|---|---|---|---|---|---|
| Semiconductor Nanotech Lab | ECE583 | C | 49973 | LEC | 4 | 1100 - 1220 | T R | 260 Everitt Laboratory | Gregory L Timp |
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Official Description
A lab course treating the practical aspects of design and testing of nanometer-scale, MOS circuit technology. Emphasis on process integration and the interrelationship between the process flow and device/circuit performance. Experience with state-of-the-art, process and device simulation tools; nanostructure characterization using atomic force and transmission electron microscopies; and capacitance, conductance and scattering parameter measurements used to extract parameters for circuit models. Course Information: Prerequisite: ECE 444; PHYS 485 or PHYS 486.
Subject Area
- Microelectronics and Photonics
Course Director
Description
A lab course treating the practical aspects of design and testing of nanometer-scale, MOS circuit technology. Emphasis on process integration and the interrelationship between the process flow and device/circuit performance. Experience with state-of-the-art, process and device simulation tools; nanostructure characterization using atomic force and transmission electron microscopies; and capacitance, conductance and scattering parameter measurements used to extract parameters for circuit models.
Texts
Class notes.
Recommended:
Yannis Tsividis, The MOS Transistor
Dieter Schroder, Semiconductor Material and Device Characterization
Last updated
2/13/2013