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ECE 583 - Semiconductor Nanotech Lab

Fall 2008

TitleRubricSectionCRNTypeHoursTimesDaysLocationInstructor
Semiconductor Nanotech LabECE583C49973LEC41100 - 1220 T R  260 Everitt Laboratory Gregory L Timp

Official Description

A lab course treating the practical aspects of design and testing of nanometer-scale, MOS circuit technology. Emphasis on process integration and the interrelationship between the process flow and device/circuit performance. Experience with state-of-the-art, process and device simulation tools; nanostructure characterization using atomic force and transmission electron microscopies; and capacitance, conductance and scattering parameter measurements used to extract parameters for circuit models. Course Information: Prerequisite: ECE 444; PHYS 485 or PHYS 486.

Subject Area

Microelectronics and Photonics

Course Director

Description

A lab course treating the practical aspects of design and testing of nanometer-scale, MOS circuit technology. Emphasis on process integration and the interrelationship between the process flow and device/circuit performance. Experience with state-of-the-art, process and device simulation tools; nanostructure characterization using atomic force and transmission electron microscopies; and capacitance, conductance and scattering parameter measurements used to extract parameters for circuit models.

Texts

Class notes.

Recommended:
Yannis Tsividis, The MOS Transistor
Dieter Schroder, Semiconductor Material and Device Characterization

Last updated

2/13/2013